- 专利标题: Self-mixing interference device for sensing applications
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申请号: US16913645申请日: 2020-06-26
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公开(公告)号: US11549799B2公开(公告)日: 2023-01-10
- 发明人: Fei Tan , Arnaud Laflaquiere , Chin Han Lin , Keith Lyon , Marc A. Drader , Weiping Li
- 申请人: Apple Inc.
- 申请人地址: US CA Cupertino
- 专利权人: Apple Inc.
- 当前专利权人: Apple Inc.
- 当前专利权人地址: US CA Cupertino
- 代理机构: Brownstein Hyatt Farbert Schreck, LLP
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01B9/02097 ; H01S5/026 ; H01S5/343 ; H01S5/183 ; H01S5/30 ; G01B11/02 ; G01S17/34 ; G01S7/4912
摘要:
Disclosed herein are self-mixing interferometry (SMI) sensors, such as may include vertical cavity surface emitting laser (VCSEL) diodes and resonance cavity photodetectors (RCPDs). Structures for the VCSEL diodes and RCPDs are disclosed. In some embodiments, a VCSEL diode and an RCPD are laterally adjacent and formed from a common set of semiconductor layers epitaxially formed on a common substrate. In some embodiments, a first and a second VCSEL diode are laterally adjacent and formed from a common set of semiconductor layers epitaxially formed on a common substrate, and an RCPD is formed on the second VCSEL diode. In some embodiments, a VCSEL diode may include two quantum well layers, with a tunnel junction layer between them. In some embodiments, an RCPD may be vertically integrated with a VCSEL diode.
公开/授权文献
- US20210003385A1 Self-Mixing Interference Device for Sensing Applications 公开/授权日:2021-01-07