Invention Grant
- Patent Title: Apparatus, system and method for energy spread ion beam
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Application No.: US17221033Application Date: 2021-04-02
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Publication No.: US11569063B2Publication Date: 2023-01-31
- Inventor: Paul J. Murphy , Frank Sinclair , Jun Lu , Daniel Tieger , Anthony Renau
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: KDB Firm PLLC
- Main IPC: H01J37/08
- IPC: H01J37/08 ; H01J37/317 ; H01J37/304 ; H01J37/32 ; H01J37/05

Abstract:
An ion implanter may include an ion source, arranged to generate a continuous ion beam, a DC acceleration system, to accelerate the continuous ion beam, as well as an AC linear accelerator to receive the continuous ion beam and to output a bunched ion beam. The ion implanter may also include an energy spreading electrode assembly, to receive the bunched ion beam and to apply an RF voltage between a plurality of electrodes of the energy spreading electrode assembly, along a local direction of propagation of the bunched ion beam.
Public/Granted literature
- US20220319806A1 APPARATUS, SYSTEM AND METHOD FOR ENERGY SPREAD ION BEAM Public/Granted day:2022-10-06
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