Invention Grant
- Patent Title: Apparatus and method for inspecting droplet
-
Application No.: US17467266Application Date: 2021-09-05
-
Publication No.: US11577506B2Publication Date: 2023-02-14
- Inventor: Kwang Sup Kim , Dong Ok Ahn , Jong Min Lee , Jun Ho Oh , Ji Hoon Yoo , Young Ho Park
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Priority: KR10-2020-0114835 20200908
- Main IPC: B41J2/045
- IPC: B41J2/045 ; B41J2/175

Abstract:
Disclosed are an apparatus and a method for quickly and accurately inspecting a droplet on a substrate. An apparatus for inspecting a droplet on a substrate according to an exemplary embodiment of the present disclosure includes: an ultrasonic sensor configured to apply an ultrasonic wave to a droplet on the substrate and detect an ultrasonic wave reflected from the substrate; and a processor configured to acquire a height of the droplet at each position on the substrate on the basis of a signal of the ultrasonic wave reflected from the droplet on the substrate, calculate a volume of the droplet on the basis of the heights of the droplet at the positions, and store or output data in relation to the volume of the droplet. The embodiment of the present disclosure may calculate the volume of the droplet using the ultrasonic wave, thereby quickly and accurately inspecting the droplet on the substrate.
Public/Granted literature
- US20220072848A1 APPARATUS AND METHOD FOR INSPECTING DROPLET Public/Granted day:2022-03-10
Information query
IPC分类: