Invention Grant
- Patent Title: Semiconductor devices having gate structures with skirt regions
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Application No.: US17329240Application Date: 2021-05-25
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Publication No.: US11600711B2Publication Date: 2023-03-07
- Inventor: Jung-Gun You , Myung-Yoon Um , Young-Joon Park , Jeong-Hyo Lee , Ji-Yong Ha , Jun-sun Hwang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR10-2015-0006772 20150114
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/78 ; H01L21/28 ; H01L29/40 ; H01L29/66 ; H01L21/762 ; H01L21/8234 ; H01L27/092 ; H01L21/8238 ; H01L27/088 ; H01L29/49

Abstract:
Provided are a semiconductor device and a method for fabricating the same. The semiconductor device includes an active fin protruding upwardly from a substrate and extending in a first direction and a gate structure extending in a second direction intersecting to cross the active fin, where a first width of a lower portion of the gate structure that contacts the active fin is greater than a second width of the lower portion of the gate structure that is spaced apart from the active fin.
Public/Granted literature
- US20210280682A1 SEMICONDUCTOR DEVICES HAVING GATE STRUCTURES WITH SKIRT REGIONS Public/Granted day:2021-09-09
Information query
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