Invention Grant
- Patent Title: Piezoelectric micromachined ultrasound transducer device with piezoelectric barrier layer
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Application No.: US16269892Application Date: 2019-02-07
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Publication No.: US11623246B2Publication Date: 2023-04-11
- Inventor: Emad Mehdizadeh , Bongsang Kim , Chienliu Chang , Leonardo Baldasarre , Nikhil Apte , Xiaoyue Jiang , Mei-Lin Chan
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Haley Guiliano LLP
- Agent Joshua Van Hoven; Stefan D. Osterbur
- Main IPC: B06B1/06
- IPC: B06B1/06 ; B06B1/02 ; H01L41/04 ; H01L41/047 ; H01L41/08 ; H01L41/187 ; H01L41/29 ; H01L41/332 ; H01L41/313 ; G06V40/13
Abstract:
A piezoelectric micromachined ultrasound transducer (PMUT) device may include a plurality of layers including a structural layer, a piezoelectric layer, and electrode layers located on opposite sides of the piezoelectric layer. Conductive barrier layers may be located between the piezoelectric layer and the electrodes to the prevent diffusion of the piezoelectric layer into the electrode layers.
Public/Granted literature
- US20190262865A1 PIEZOELECTRIC MICROMACHINED ULTRASOUND TRANSDUCER DEVICE Public/Granted day:2019-08-29
Information query
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