- 专利标题: Airgap vertical transistor without structural collapse
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申请号: US17131904申请日: 2020-12-23
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公开(公告)号: US11637179B2公开(公告)日: 2023-04-25
- 发明人: Kangguo Cheng , Chanro Park , Juntao Li , Ruilong Xie
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 Daniel Yeates
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L21/768 ; H01L27/088 ; H01L29/78 ; H01L21/764 ; H01L21/762 ; H01L21/311 ; H01L21/8234 ; H01L21/8238 ; H01L29/66
摘要:
Embodiments of the present invention are directed to forming an airgap-based vertical field effect transistor (VFET) without structural collapse. A dielectric collar anchors the structure while forming the airgaps. In a non-limiting embodiment of the invention, a vertical transistor is formed over a substrate. The vertical transistor can include a fin, a top spacer, a top source/drain (S/D) on the fin, and a contact on the top S/D. A dielectric layer is recessed below a top surface of the top spacer and a dielectric collar is formed on the recessed surface of the dielectric layer. Portions of the dielectric layer are removed to form a first cavity and a second cavity. A first airgap is formed in the first cavity and a second airgap is formed in the second cavity. The dielectric collar anchors the top S/D to the top spacer while forming the first airgap and the second airgap.
公开/授权文献
- US20210118721A1 AIRGAP VERTICAL TRANSISTOR WITHOUT STRUCTURAL COLLAPSE 公开/授权日:2021-04-22
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