Invention Grant
- Patent Title: Transistor device with (anti)ferroelectric spacer structures
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Application No.: US16363952Application Date: 2019-03-25
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Publication No.: US11640984B2Publication Date: 2023-05-02
- Inventor: Jack Kavalieros , Ian Young , Matthew Metz , Uygar Avci , Chia-Ching Lin , Owen Loh , Seung Hoon Sung , Aditya Kasukurti , Sou-Chi Chang , Tanay Gosavi , Ashish Verma Penumatcha
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Essential Patents Group, LLP
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H01L29/78

Abstract:
Techniques and mechanisms for providing electrical insulation or other protection of an integrated circuit (IC) device with a spacer structure which comprises an (anti)ferromagnetic material. In an embodiment, a transistor comprises doped source or drain regions and a channel region which are each disposed in a fin structure, wherein a gate electrode and an underlying dielectric layer of the transistor each extend over the channel region. Insulation spacers are disposed on opposite sides of the gate electrode, where at least a portion of one such insulation spacer comprises an (anti)ferroelectric material. Another portion of the insulation spacer comprises a non-(anti)ferroelectric material. In another embodiment, the two portions of the spacer are offset vertically from one another, wherein the (anti)ferroelectric portion forms a bottom of the spacer.
Public/Granted literature
- US20200312978A1 TRANSISTOR DEVICE WITH (ANTI)FERROELECTRIC SPACER STRUCTURES Public/Granted day:2020-10-01
Information query
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