Invention Grant
- Patent Title: Method of forming structures using a neutral beam
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Application No.: US16930211Application Date: 2020-07-15
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Publication No.: US11643724B2Publication Date: 2023-05-09
- Inventor: Tomohiro Kubota , Mitsuya Utsuno , Toshihisa Nozawa , Seiji Samukawa , Hua Hsuan Chen
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Versterkerstraat
- Agency: Snell & Wilmer L.L.P.
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H05H3/02 ; C23C16/40 ; C23C16/48
Abstract:
Methods of forming structures using a neutral beam, structures formed using a neutral beam, and reactor systems for forming the structures are disclosed. The neutral beam can be used to provide activated species during deposition of a layer and/or to provide activated species to treat a deposited layer.
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