Invention Grant
- Patent Title: Ferroelectric thin-film structure and electronic device including the same
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Application No.: US17112355Application Date: 2020-12-04
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Publication No.: US11646375B2Publication Date: 2023-05-09
- Inventor: Yunseong Lee , Jinseong Heo , Sangwook Kim , Taehwan Moon , Sanghyun Jo
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR 20200026794 2020.03.03
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/1159 ; H01L29/51 ; H01L21/02

Abstract:
Provided is a ferroelectric thin-film structure including a semiconductor substrate, a first ferroelectric layer on the semiconductor substrate, and a second ferroelectric layer on the semiconductor substrate. The second ferroelectric layer is spaced apart from the first ferroelectric layer and has a different dielectric constant from the first ferroelectric layer. The first ferroelectric layer and the second ferroelectric layer may be different from each other in terms of the amount of a dopant contained therein, and may exhibit different threshold voltages when applied to transistors.
Public/Granted literature
- US20210280720A1 FERROELECTRIC THIN-FILM STRUCTURE AND ELECTRONIC DEVICE INCLUDING THE SAME Public/Granted day:2021-09-09
Information query
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