Invention Grant
- Patent Title: Metrology for OLED manufacturing using photoluminescence spectroscopy
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Application No.: US17188485Application Date: 2021-03-01
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Publication No.: US11662317B2Publication Date: 2023-05-30
- Inventor: Avishek Ghosh , Byung-Sung Kwak , Todd Egan , Robert Jan Visser , Gangadhar Banappanavar , Dinesh Kabra
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Priority: IN 1841014177 2018.04.13
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/64 ; H01L51/52

Abstract:
An apparatus for determining a characteristic of a photoluminescent (PL) layer comprises: a light source that generates an excitation light that includes light from the visible or near-visible spectrum; an optical assembly configured to direct the excitation light onto a PL layer; a detector that is configured to receive a PL emission generated by the PL layer in response to the excitation light interacting with the PL layer and generate a signal based on the PL emission; and a computing device coupled to the detector and configured to receive the signal from the detector and determine a characteristic of the PL layer based on the signal.
Public/Granted literature
- US20210208077A1 METROLOGY FOR OLED MANUFACTURING USING PHOTOLUMINESCENCE SPECTROSCOPY Public/Granted day:2021-07-08
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