Invention Grant
- Patent Title: Method for controlling a manufacturing apparatus and associated apparatuses
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Application No.: US16762982Application Date: 2018-11-09
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Publication No.: US11669017B2Publication Date: 2023-06-06
- Inventor: Roy Werkman , Bijoy Rajasekharan , Lydia Marianna Vergaij-Huizer , Jochem Sebastiaan Wildenberg , Ronald Van Ittersum , Pieter Gerardus Jacobus Smorenberg , Robertus Wilhelmus Van Der Heijden , Xiuhong Wei , Hadi Yagubizade
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: EP 205900 2017.12.07
- International Application: PCT/EP2018/080708 2018.11.09
- International Announcement: WO2019/110238A 2019.06.13
- Date entered country: 2020-05-11
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A method for determining a plurality of corrections for control of at least one manufacturing apparatus used in a manufacturing process for providing product structures to a substrate in a plurality of layers, the method including: determining the plurality of corrections including a correction for each layer, based on an actuation potential of the applicable manufacturing apparatus used in the formation of each layer, wherein the determining includes determining corrections for each layer simultaneously in terms of a matching parameter.
Public/Granted literature
- US20200278614A1 METHOD FOR CONTROLLING A MANUFACTURING APPARATUS AND ASSOCIATED APPARATUSES Public/Granted day:2020-09-03
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