Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing same
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Application No.: US17143632Application Date: 2021-01-07
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Publication No.: US11672117B2Publication Date: 2023-06-06
- Inventor: Kotaro Fujii , Jun Fujiki , Shinya Arai
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H10B43/10
- IPC: H10B43/10 ; H01L27/11565 ; H01L27/1157 ; H01L27/11582 ; H01L27/11575 ; H01L27/11573

Abstract:
A semiconductor memory device includes a semiconductor substrate, a first insulating film provided above the semiconductor substrate, a first conductive film provided above the first insulating film, a plurality of first electrode films provided above the first conductive film and stacked to be separated from each other, a semiconductor member extending in a stacking direction of the plurality of first electrode films, and a charge storage member provided between the semiconductor member and one of the plurality of first electrode films. The first conductive film includes a main portion disposed at least below the plurality of first electrode films, and a fine line portion extending from the main portion toward an end surface side of the semiconductor substrate. A width of the fine line portion is narrower than a width of the main portion.
Public/Granted literature
- US20210126003A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2021-04-29
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