- Patent Title: Method for cleaning a vacuum system used in the manufacture of OLED devices, method for vacuum deposition on a substrate to manufacture OLED devices, and apparatus for vacuum deposition on a substrate to manufacture OLED devices
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Application No.: US16318052Application Date: 2017-04-28
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Publication No.: US11673170B2Publication Date: 2023-06-13
- Inventor: Jose Manuel Dieguez-Campo , Stefan Keller , Jae Won Lee , Takashi Anjiki , Dieter Haas
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- International Application: PCT/EP2017/060239 2017.04.28
- International Announcement: WO2018/197008A 2018.11.01
- Date entered country: 2019-01-15
- Main IPC: B08B7/04
- IPC: B08B7/04 ; B08B3/08 ; B08B7/00 ; B08B9/08 ; C23C14/12 ; C23C14/24 ; C23C14/56 ; H01L51/00 ; H01L51/56
Abstract:
The present disclosure provides a method for cleaning a vacuum system used in the manufacture of OLED devices. The method includes performing pre-cleaning for cleaning at least a portion of the vacuum system, and performing plasma cleaning using a remote plasma source.
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