公开(公告)号：US11673170B2

公开(公告)日：2023-06-13

申请号：US16318052

申请日：2017-04-28

Applicant: Applied Materials, Inc.

Inventor： Jose Manuel Dieguez-Campo ,  Stefan Keller ,  Jae Won Lee ,  Takashi Anjiki ,  Dieter Haas

IPC: B08B7/04 ,  B08B3/08 ,  B08B7/00 ,  B08B9/08 ,  C23C14/12 ,  C23C14/24 ,  C23C14/56 ,  H01L51/00 ,  H01L51/56

CPC classification number: B08B7/04 ,  B08B3/08 ,  B08B7/0035 ,  B08B9/08 ,  C23C14/12 ,  C23C14/24 ,  C23C14/566 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/56 ,  B08B2209/08

Abstract: The present disclosure provides a method for cleaning a vacuum system used in the manufacture of OLED devices. The method includes performing pre-cleaning for cleaning at least a portion of the vacuum system, and performing plasma cleaning using a remote plasma source.

公开(公告)号：US12127441B2

公开(公告)日：2024-10-22

申请号：US18183822

申请日：2023-03-14

Applicant: Applied Materials, Inc.

Inventor： Yu-hsin Lin ,  Ji Young Choung ,  Chung-chia Chen ,  Jungmin Lee ,  Wen-Hao Wu ,  Takashi Anjiki ,  Takuji Kato ,  Dieter Haas ,  Si Kyoung Kim ,  Stefan Keller

IPC: H10K59/122 ,  H10K50/822 ,  H10K50/844 ,  H10K59/173

CPC classification number: H10K59/122 ,  H10K50/822 ,  H10K50/844 ,  H10K59/173

Abstract: Embodiments described herein relate to a device including a substrate, a plurality of adjacent pixel-defining layer (PDL) structures disposed over the substrate, and a plurality of sub-pixels. Each sub-pixel includes adjacent first overhangs, adjacent second overhangs, an anode, a hole injection layer (HIL) material, an additional organic light emitting diode (OLED) material, and a cathode. Each first overhang is defined by a body structure disposed on and extending laterally past a base structure disposed on the PDL structure. Each second overhang is defined by a top structure disposed on and extending laterally past the body structure. The HIL material is disposed over and in contact with the anode and disposed under the adjacent first overhangs. The additional OLED material is disposed on the HIL material and extends under the first overhang.

公开(公告)号：US11610954B1

公开(公告)日：2023-03-21

申请号：US17744364

申请日：2022-05-13

Applicant: Applied Materials, Inc.

Inventor： Yu-Hsin Lin ,  Ji-Young Choung ,  Chung-Chia Chen ,  Jungmin Lee ,  Wen-Hao Wu ,  Takashi Anjiki ,  Takuji Kato ,  Dieter Haas ,  Si Kyoung Kim ,  Stefan Keller

IPC: H01L27/32 ,  H01L51/52

Abstract: Embodiments described herein relate to a device including a substrate, a plurality of adjacent pixel-defining layer (PDL) structures disposed over the substrate, and a plurality of sub-pixels. Each sub-pixel includes adjacent first overhangs, adjacent second overhangs, an anode, a hole injection layer (HIL) material, an additional organic light emitting diode (OLED) material, and a cathode. Each first overhang is defined by a body structure disposed over and extending laterally past a base structure disposed over the PDL structure. Each second overhang is defined by a top structure disposed over and extending laterally past the body structure. The HIL material is disposed over and in contact with the anode and disposed under the adjacent first overhangs. The additional OLED material is disposed over the HIL material and extends under the first overhang.