Invention Grant
- Patent Title: Apparatus and method for treating substrate
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Application No.: US16861709Application Date: 2020-04-29
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Publication No.: US11679447B2Publication Date: 2023-06-20
- Inventor: Soo Young Park , Ohyeol Kwon , Jun Keon Ahn , Jung Hwan Lee
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-Do
- Agency: Procopio, Cory, Hargreaves & Savitch LLP
- Priority: KR 20190050336 2019.04.30
- Main IPC: B23K26/042
- IPC: B23K26/042 ; B23K26/03 ; B23K26/08 ; H01L21/02 ; H01L21/68 ; H01L21/66

Abstract:
Disclosed is a substrate treating apparatus. The substrate treating apparatus includes a chamber providing a space in which a substrate is treated, a support unit supporting the substrate inside the chamber, a laser unit irradiating laser to an edge region of the substrate, a vision unit capturing the edge region of the substrate to measure an offset value of the substrate, and an adjustment unit adjusting an irradiation location of the laser based on the offset value of the substrate.
Public/Granted literature
- US20200346299A1 APPARATUS AND METHOD FOR TREATING SUBSTRATE Public/Granted day:2020-11-05
Information query
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