Invention Grant
- Patent Title: Photoresist bottle replacement system
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Application No.: US17113371Application Date: 2020-12-07
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Publication No.: US11679510B2Publication Date: 2023-06-20
- Inventor: Oliver Yu , Huei-Chi Chiu , Shi-Ming Wang , Li-Jen Wu , Yu Kai Chen , Sharon Yang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- The original application number of the division: US16034886 2018.07.13
- Main IPC: B25J11/00
- IPC: B25J11/00 ; G03F7/00 ; B25J15/08 ; B25J13/00 ; G05D1/02

Abstract:
The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.
Public/Granted literature
- US20210086368A1 PHOTORESIST BOTTLE REPLACEMENT SYSTEM Public/Granted day:2021-03-25
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