公开(公告)号：US11679510B2

公开(公告)日：2023-06-20

申请号：US17113371

申请日：2020-12-07

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Oliver Yu ,  Huei-Chi Chiu ,  Shi-Ming Wang ,  Li-Jen Wu ,  Yu Kai Chen ,  Sharon Yang

IPC: B25J11/00 ,  G03F7/00 ,  B25J15/08 ,  B25J13/00 ,  G05D1/02

CPC classification number: B25J11/005 ,  B25J13/006 ,  B25J15/08 ,  G03F7/003 ,  G05D1/0212 ,  G05D2201/0216

Abstract: The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.

公开(公告)号：US10943802B2

公开(公告)日：2021-03-09

申请号：US16233701

申请日：2018-12-27

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yu Kai Chen ,  Chia-Hung Chung ,  Ko-Bin Kao ,  Shi-Ming Wang ,  Su-Yu Yeh ,  Li-Jen Wu ,  Oliver Yu ,  Wen-Shiung Chen

IPC: H01L21/67 ,  G03F7/16

Abstract: The present disclosure describes a container for placing an object therein. The container includes a container body and a lid over the container body, a collision-preventing portion attached to one or more of the container body and the lid and configured to buffer an impact force, a pairing recognition mechanism configured to detect an object placed in the container body, and a liquid-detecting sensor configured to detect a leakage from the object.

公开(公告)号：US10857676B2

公开(公告)日：2020-12-08

申请号：US16034886

申请日：2018-07-13

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Oliver Yu ,  Huei-Chi Chiu ,  Shi-Ming Wang ,  Li-Jen Wu ,  Yu Kai Chen ,  Sharon Yang

IPC: B25J11/00 ,  G03F7/00 ,  B25J15/08 ,  B25J13/00 ,  G05D1/02

Abstract: The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.

公开(公告)号：US11029603B2

公开(公告)日：2021-06-08

申请号：US16226139

申请日：2018-12-19

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yu Kai Chen ,  Forster Yuan ,  Ko-Bin Kao ,  Shi-Ming Wang ,  Su-Yu Yeh ,  Li-Jen Wu ,  Oliver Yu

IPC: G03F7/16 ,  H01L21/67 ,  B25J9/16 ,  B25J5/00 ,  G06K19/07

Abstract: Embodiments of the present disclosure describe a chemical replacement system and a method to automatically replace PR bottles. The chemical replacement system includes a computer system and a transfer module. The computer system can receive a request signal to replace one or more chemical containers and transmit a command to the transfer module. The transfer module, being controlled by the computer system, can include a holder configured to hold the one or more chemical containers (e.g., PR bottles); a door unit configured to open in response to the command; and a transfer unit configured to eject the holder in response to the command for replacement. The chemical replacement system can further include an automated vehicle configured to replace the one or more chemical containers in the ejected holder.

公开(公告)号：US20230264360A1

公开(公告)日：2023-08-24

申请号：US18310219

申请日：2023-05-01

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Oliver Yu ,  Huei-Chi Chiu ,  Shi-Ming Wang ,  Li-Jen Wu ,  Yu Kai Chen ,  Sharon Yang

IPC: B25J11/00 ,  G03F7/00 ,  B25J15/08 ,  B25J13/00 ,  G05D1/02

CPC classification number: B25J11/005 ,  G03F7/003 ,  B25J15/08 ,  B25J13/006 ,  G05D1/0212 ,  G05D2201/0216

Abstract: The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.