公开(公告)号：US20230264360A1

公开(公告)日：2023-08-24

申请号：US18310219

申请日：2023-05-01

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Oliver Yu ,  Huei-Chi Chiu ,  Shi-Ming Wang ,  Li-Jen Wu ,  Yu Kai Chen ,  Sharon Yang

IPC: B25J11/00 ,  G03F7/00 ,  B25J15/08 ,  B25J13/00 ,  G05D1/02

CPC classification number: B25J11/005 ,  G03F7/003 ,  B25J15/08 ,  B25J13/006 ,  G05D1/0212 ,  G05D2201/0216

Abstract: The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.

公开(公告)号：US11679510B2

公开(公告)日：2023-06-20

申请号：US17113371

申请日：2020-12-07

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Oliver Yu ,  Huei-Chi Chiu ,  Shi-Ming Wang ,  Li-Jen Wu ,  Yu Kai Chen ,  Sharon Yang

IPC: B25J11/00 ,  G03F7/00 ,  B25J15/08 ,  B25J13/00 ,  G05D1/02

CPC classification number: B25J11/005 ,  B25J13/006 ,  B25J15/08 ,  G03F7/003 ,  G05D1/0212 ,  G05D2201/0216

Abstract: The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.

公开(公告)号：US20210086368A1

公开(公告)日：2021-03-25

申请号：US17113371

申请日：2020-12-07

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Oliver YU ,  Huei-Chi CHIU ,  Shi-Ming WANG ,  Li-Jen Wu ,  Yu Kai Chen ,  Sharon Yang

IPC: B25J11/00 ,  G03F7/00 ,  B25J15/08 ,  B25J13/00 ,  G05D1/02

Abstract: The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.

公开(公告)号：US10857676B2

公开(公告)日：2020-12-08

申请号：US16034886

申请日：2018-07-13

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Oliver Yu ,  Huei-Chi Chiu ,  Shi-Ming Wang ,  Li-Jen Wu ,  Yu Kai Chen ,  Sharon Yang

IPC: B25J11/00 ,  G03F7/00 ,  B25J15/08 ,  B25J13/00 ,  G05D1/02

Abstract: The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.