Invention Grant
- Patent Title: Structure of semiconductor device structure having fins
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Application No.: US16902190Application Date: 2020-06-15
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Publication No.: US11682716B2Publication Date: 2023-06-20
- Inventor: Che-Cheng Chang , Jui-Ping Chuang , Chen-Hsiang Lu , Yu-Cheng Liu , Wei-Ting Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- The original application number of the division: US14725555 2015.05.29
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L21/8238 ; H01L27/092 ; H01L29/06 ; H01L29/423 ; H01L29/08 ; H01L29/16 ; H01L29/161 ; H01L29/165 ; H01L29/24 ; H01L29/267 ; H01L29/49 ; H01L29/51 ; H01L21/311 ; H01L21/762

Abstract:
Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a fin structure over a semiconductor substrate. The semiconductor device structure also includes a gate stack covering a portion of the fin structure, and the gate stack includes a work function layer and a metal filling over the work function layer. The semiconductor device structure further includes an isolation element over the semiconductor substrate and adjacent to the gate stack. The isolation element is in direct contact with the work function layer and the metal filling.
Public/Granted literature
- US20200312985A1 Structure of Semiconductor Device Structure Having Fins Public/Granted day:2020-10-01
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