- 专利标题: Resistive random access memory integrated with vertical transport field effect transistors
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申请号: US16701194申请日: 2019-12-03
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公开(公告)号: US11683941B2公开(公告)日: 2023-06-20
- 发明人: Alexander Reznicek , Karthik Balakrishnan , Bahman Hekmatshoartabari , Takashi Ando
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 L. Jeffrey Kelly
- 主分类号: H10B63/00
- IPC分类号: H10B63/00 ; H10N70/00 ; H10N70/20
摘要:
A semiconductor structure may include two vertical transport field effect transistors comprising a top source drain, a bottom source drain, and an epitaxial channel and a resistive random access memory between the two vertical transport field effect transistors, the resistive random access memory may include an oxide layer, a top electrode, and a bottom electrode, wherein the oxide layer may contact the top source drain of the two vertical field effect transistor. The top source drain may function as the bottom electrode of the resistive random access memory. The semiconductor structure may include a shallow trench isolation between the two vertical transport field effect transistors, the shallow trench isolation may be embedded in a first spacer, a doped source, and a portion of a substrate.
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