- 专利标题: Techniques for MRAM MTJ top electrode connection
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申请号: US16717115申请日: 2019-12-17
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公开(公告)号: US11683990B2公开(公告)日: 2023-06-20
- 发明人: Harry-Hak-Lay Chuang , Chern-Yow Hsu , Shih-Chang Liu
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Eschweiler & Potashnik, LLC
- 分案原申请号: US15000289 2016.01.19
- 主分类号: H01L43/08
- IPC分类号: H01L43/08 ; H10N50/10 ; H10N50/01 ; H10B61/00
摘要:
Some embodiments relate to an integrated circuit including a semiconductor substrate and an interconnect structure disposed over the semiconductor substrate. The interconnect structure includes a plurality of dielectric layers and a plurality of metal layers that are stacked over one another in alternating fashion. The plurality of metal layers include a lower metal layer and an upper metal layer disposed over the lower metal layer. A bottom electrode is disposed over and in electrical contact with the lower metal layer. A dielectric layer is disposed over an upper surface of the bottom electrode. A top electrode is disposed over an upper surface of the dielectric layer and is in direct electrical contact with a lower surface of the upper metal layer.
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