- 专利标题: Semiconductor device and method of forming interposer with opening to contain semiconductor die
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申请号: US15846014申请日: 2017-12-18
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公开(公告)号: US11688612B2公开(公告)日: 2023-06-27
- 发明人: Reza A. Pagaila , Yaojian Lin , Jun Mo Koo , HeeJo Chi
- 申请人: STATS ChipPAC Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC Pte Ltd.
- 当前专利权人: STATS ChipPAC Pte Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Atkins and Associates, P.C.
- 代理商 Robert D. Atkins
- 分案原申请号: US12714190 2010.02.26
- 主分类号: H01L21/56
- IPC分类号: H01L21/56 ; H01L21/683 ; H01L23/13 ; H01L23/31 ; H01L23/498 ; H01L23/00 ; H01L25/065 ; H01L25/10 ; H01L25/16 ; H01L23/552
摘要:
A semiconductor device has an interposer mounted over a carrier. The interposer includes TSV formed either prior to or after mounting to the carrier. An opening is formed in the interposer. The interposer can have two-level stepped portions with a first vertical conduction path through a first stepped portion and second vertical conduction path through a second stepped portion. A first and second semiconductor die are mounted over the interposer. The second die is disposed within the opening of the interposer. A discrete semiconductor component can be mounted over the interposer. A conductive via can be formed through the second die or encapsulant. An encapsulant is deposited over the first and second die and interposer. A portion of the interposer can be removed to that the encapsulant forms around a side of the semiconductor device. An interconnect structure is formed over the interposer and second die.
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