- Patent Title: Semiconductor memory device and method for manufacturing the same
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Application No.: US17387427Application Date: 2021-07-28
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Publication No.: US11688779B2Publication Date: 2023-06-27
- Inventor: Hui-Jung Kim , Junhyeok Ahn , Jae Hyun Yoon , Myeong-Dong Lee , Seok Hwan Lee , Sunghee Han , Inkyoung Heo
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: F. Chau & Associates, LLC
- Priority: KR 20200099147 2020.08.07
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/06 ; H01L29/08 ; H01L29/16 ; H01L29/45 ; H01L27/108

Abstract:
A semiconductor memory device includes a substrate having a first active pattern including first and second source/drain regions, a gate electrode intersecting the first active pattern and disposed between the first and second source/drain regions, a bit line intersecting the first active pattern and electrically connected to the first source/drain region, a spacer disposed on a sidewall of the bit line, a contact electrically connected to the second source/drain region and spaced apart from the bit line with the spacer interposed therebetween, an interface layer disposed between the second source/drain region and the contact, and forming an ohmic contact between the second source/drain region and the contact, and a data storage element disposed on the contact. A bottom of the contact is lower than a top surface of the substrate. The contact is formed of a metal, a conductive metal nitride, and/or a combination thereof.
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