Invention Grant
- Patent Title: Annealed seed layer to improve ferroelectric properties of memory layer
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Application No.: US17184892Application Date: 2021-02-25
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Publication No.: US11690228B2Publication Date: 2023-06-27
- Inventor: Song-Fu Liao , Rainer Yen-Chieh Huang , Hai-Ching Chen , Chung-Te Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H10B51/30 ; H01L21/768 ; H10B53/30

Abstract:
In some embodiments, the present disclosure relates to an integrated chip that includes a first conductive structure arranged over a substrate. A memory layer is arranged over the first conductive structure, below a second conductive structure, and includes a ferroelectric material. An annealed seed layer is arranged between the first and second conductive structures and directly on a first side of the memory layer. An amount of the crystal structure that includes an orthorhombic phase is greater than about 35 percent.
Public/Granted literature
- US20220271047A1 ANNEALED SEED LAYER TO IMPROVE FERROELECTRIC PROPERTIES OF MEMORY LAYER Public/Granted day:2022-08-25
Information query
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