公开(公告)号：US12219880B2

公开(公告)日：2025-02-04

申请号：US18595256

申请日：2024-03-04

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Tai-Yen Peng ,  Hui-Hsien Wei ,  Wei-Chih Wen ,  Pin-Ren Dai ,  Chien-Min Lee ,  Sheng-Chih Lai ,  Han-Ting Tsai ,  Chung-Te Lin

IPC: H10N50/01 ,  G11C11/16 ,  H10B61/00 ,  H10N50/10 ,  H10N50/80

Abstract: A memory device includes a bottom electrode contact, a magnetic tunnel junction pattern, a protection insulating layer, a first capping layer, an interlayer insulating layer, and a second capping layer. The magnetic tunnel junction pattern is over the bottom electrode contact. The protection insulating layer surrounds the magnetic tunnel junction pattern. The first capping layer surrounds the protection insulating layer. The interlayer insulating layer surrounds the first capping layer. The second capping layer is over the first capping layer and the interlayer insulating layer.

公开(公告)号：US20240381656A1

公开(公告)日：2024-11-14

申请号：US18783024

申请日：2024-07-24

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Han-Jong Chia ,  Chung-Te Lin ,  Feng-Cheng Yang ,  Meng-Han Lin ,  Sheng-Chen Wang

IPC: H10B51/20 ,  G11C11/22 ,  G11C11/56 ,  H01L21/28 ,  H01L29/66 ,  H01L29/78 ,  H10B51/10 ,  H10B51/30

Abstract: In an embodiment, a device includes: a first dielectric layer over a substrate; a word line over the first dielectric layer, the word line including a first main layer and a first glue layer, the first glue layer extending along a bottom surface, a top surface, and a first sidewall of the first main layer; a second dielectric layer over the word line; a first bit line extending through the second dielectric layer and the first dielectric layer; and a data storage strip disposed between the first bit line and the word line, the data storage strip extending along a second sidewall of the word line.

公开(公告)号：US11980040B2

公开(公告)日：2024-05-07

申请号：US17346855

申请日：2021-06-14

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tai-Yen Peng ,  Tsung-Hsien Chang ,  Yu-Shu Chen ,  Chih-Yuan Ting ,  Jyu-Horng Shieh ,  Chung-Te Lin

IPC: H10B61/00 ,  H10N50/01 ,  H10N50/10 ,  G11C11/16

CPC classification number: H10B61/22 ,  H10N50/01 ,  H10N50/10 ,  G11C11/1659

Abstract: A semiconductor device includes a substrate; a memory array over the substrate, the memory array including first magnetic tunnel junctions (MTJs), where the first MTJs are in a first dielectric layer over the substrate; and a resistor circuit over the substrate, the resistor circuit including second MTJs, where the second MTJs are in the first dielectric layer.

公开(公告)号：US20240099005A1

公开(公告)日：2024-03-21

申请号：US18524627

申请日：2023-11-30

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Sheng-Chih Lai ,  Chung-Te Lin ,  Yung-Yu Chen

IPC: H10B43/27 ,  H01L23/532 ,  H10B43/20

CPC classification number: H10B43/27 ,  H01L23/53257 ,  H10B43/20 ,  H01L29/40117

Abstract: Memory devices and methods of forming the same are provided. A memory device of the present disclosure includes a bottom dielectric layer, a gate structure extending vertically from the bottom dielectric layer, a stack structure, and a dielectric layer extending between the gate structure and the stack structure. The stack structure includes a first silicide layer, a second silicide layer, an oxide layer extending bet ween the first and second silicide layers, a channel region over the oxide layer and extending between the first and second silicide layers, and an isolation layer over the second silicide layer. The first and second silicide layers include cobalt, titanium, tungsten, or palladium.

公开(公告)号：US11910616B2

公开(公告)日：2024-02-20

申请号：US17818562

申请日：2022-08-09

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Meng-Han Lin ,  Han-Jong Chia ,  Sheng-Chen Wang ,  Feng-Cheng Yang ,  Yu-Ming Lin ,  Chung-Te Lin

IPC: H10B51/20 ,  H01L29/417 ,  H01L23/535 ,  H10B51/00 ,  H10B51/10 ,  H10B51/30

CPC classification number: H10B51/20 ,  H01L23/535 ,  H01L29/41741 ,  H01L29/41775 ,  H10B51/00 ,  H10B51/10 ,  H10B51/30

Abstract: In an embodiment, a device includes: a word line extending in a first direction; a data storage layer on a sidewall of the word line; a channel layer on a sidewall of the data storage layer; a back gate isolator on a sidewall of the channel layer; and a bit line having a first main region and a first extension region, the first main region contacting the channel layer, the first extension region separated from the channel layer by the back gate isolator, the bit line extending in a second direction, the second direction perpendicular to the first direction.

公开(公告)号：US11903216B2

公开(公告)日：2024-02-13

申请号：US17744212

申请日：2022-05-13

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Feng-Cheng Yang ,  Meng-Han Lin ,  Sheng-Chen Wang ,  Han-Jong Chia ,  Chung-Te Lin

IPC: H10B51/20 ,  H01L21/3213 ,  H01L21/768 ,  H01L23/522 ,  H10B51/30

CPC classification number: H10B51/20 ,  H01L21/32133 ,  H01L21/7684 ,  H01L21/76802 ,  H01L21/76871 ,  H01L21/76877 ,  H01L23/5226 ,  H10B51/30

Abstract: In accordance with embodiments, a memory array is formed with a multiple patterning process. In embodiments a first trench is formed within a multiple layer stack and a first conductive material is deposited into the first trench. After the depositing the first conductive material, a second trench is formed within the multiple layer stack, and a second conductive material is deposited into the second trench. The first conductive material and the second conductive material are etched.

公开(公告)号：US11856775B2

公开(公告)日：2023-12-26

申请号：US17228072

申请日：2021-04-12

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Sheng-Chih Lai ,  Chung-Te Lin ,  Yung-Yu Chen

IPC: H10B43/20 ,  H10B41/20 ,  H10B43/27 ,  H01L23/532 ,  H01L21/28

CPC classification number: H10B43/27 ,  H01L23/53257 ,  H10B43/20 ,  H01L29/40117 ,  H01L2924/1438

Abstract: Memory devices and methods of forming the same are provided. A memory device of the present disclosure includes a bottom dielectric layer, a gate structure extending vertically from the bottom dielectric layer, a stack structure, and a dielectric layer extending between the gate structure and the stack structure. The stack structure includes a first silicide layer, a second silicide layer, an oxide layer extending between the first and second silicide layers, a channel region over the oxide layer and extending between the first and second silicide layers, and an isolation layer over the second silicide layer. The first and second silicide layers include cobalt, titanium, tungsten, or palladium.

公开(公告)号：US11843056B2

公开(公告)日：2023-12-12

申请号：US17377664

申请日：2021-07-16

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Neil Quinn Murray ,  Katherine H. Chiang ,  Chung-Te Lin

IPC: H01L29/66 ,  H01L27/12 ,  H01L29/786

CPC classification number: H01L29/78642 ,  H01L27/124 ,  H01L27/127 ,  H01L27/1225 ,  H01L29/66969 ,  H01L29/7869 ,  H01L27/1255

Abstract: A semiconductor structure is provided. The semiconductor structure may include a transistor structure, the transistor structure may include a gate region arranged over an upper surface of a substrate and extending substantially in a first direction that is perpendicular to the upper surface of the substrate; a first source/drain region over the upper surface of the substrate; a second source/drain region over the upper surface of the substrate; and a channel region vertically extending in the first direction between the first source/drain region and the second source/drain region, wherein the channel region comprises an oxide semiconductor material. Along the first direction, the gate region covers a sidewall of the channel region.

公开(公告)号：US11647634B2

公开(公告)日：2023-05-09

申请号：US17018114

申请日：2020-09-11

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Feng-Cheng Yang ,  Meng-Han Lin ,  Han-Jong Chia ,  Sheng-Chen Wang ,  Chung-Te Lin

IPC: H01L27/11 ,  H01L27/11597 ,  H01L29/78 ,  G11C5/06 ,  G11C11/22 ,  H01L21/822 ,  H01L29/66

CPC classification number: H01L27/11597 ,  G11C5/06 ,  G11C11/223 ,  H01L21/8221 ,  H01L29/6684 ,  H01L29/78391

Abstract: A semiconductor device and method of manufacture are provided. In embodiments a memory array is formed by manufacturing portions of a word line during different and separate processes, thereby allowing the portions formed first to act as a structural support during later processes that would otherwise cause undesired damage to the structures.

公开(公告)号：US11581334B2

公开(公告)日：2023-02-14

申请号：US17168342

申请日：2021-02-05

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Rainer Yen-Chieh Huang ,  Hai-Ching Chen ,  Chung-Te Lin

IPC: H01L27/11 ,  H01L29/51 ,  H01L27/1159 ,  H01L29/78 ,  H01L21/28 ,  H01L29/66 ,  H01L23/522

Abstract: In some embodiments, the present disclosure relates to an integrated chip that includes a gate electrode arranged over a substrate. A gate dielectric layer is arranged over the gate electrode, and an active structure is arranged over the gate dielectric layer. A source contact and a drain contact are arranged over the active structure. The active structure includes a stack of cocktail layers alternating with first active layers. The cocktail layers include a mixture of a first material and a second material. The first active layers include a third material that is different than the first and second materials. The bottommost layer of the active structure is one of the cocktail layers.