Invention Grant
- Patent Title: Quantum device and method of manufacturing the same
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Application No.: US17349281Application Date: 2021-06-16
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Publication No.: US11696517B2Publication Date: 2023-07-04
- Inventor: Kenji Nanba , Ayami Yamaguchi , Akira Miyata , Katsumi Kikuchi , Suguru Watanabe , Takanori Nishi , Hideyuki Satou
- Applicant: NEC Corporation
- Applicant Address: JP Tokyo
- Assignee: NEC CORPORATION
- Current Assignee: NEC CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP 20106152 2020.06.19
- Main IPC: G06N10/00
- IPC: G06N10/00 ; H10N60/81 ; H10N60/01

Abstract:
A quantum device (100) includes: an interposer (112); a quantum chip (111); and a connection part (130) that is provided between the interposer (112) and the quantum chip (111) and electrically connects a wiring layer of the interposer (112) to a wiring layer of the quantum chip (111), in which the connection part (130) includes: a plurality of pillars (131) arranged on a main surface of the interposer (112); and a metal film (132) provided on a surface of the plurality of pillars (131) in such a way that it contacts the wiring layer of the quantum chip (111) and the thickness of the metal film at outer peripheral parts of the tip of each of the plurality of pillars (131) becomes larger than the thickness of the metal film at a center part of the tip of each of the plurality of pillars (131).
Public/Granted literature
- US20210399194A1 QUANTUM DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2021-12-23
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