Invention Grant
- Patent Title: Integrated thin film resistor and memory device
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Application No.: US17139117Application Date: 2020-12-31
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Publication No.: US11742283B2Publication Date: 2023-08-29
- Inventor: Kah Wee Gan , Benfu Lin , Yun Ling Tan
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Calderon Safran & Cole, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H10B61/00 ; H10N50/01 ; H10N50/80 ; H01L49/02

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to an integrated thin film resistor with a memory device and methods of manufacture. The structure includes a memory device in back end of line (BEOL) materials and a thin film resistor located in the BEOL materials. The thin film resistor includes electrical resistive material, and an insulator material over the electrical resistive material is thicker than insulator material over the memory device.
Public/Granted literature
- US20220208675A1 INTEGRATED THIN FILM RESISTOR AND MEMORY DEVICE Public/Granted day:2022-06-30
Information query
IPC分类: