Invention Grant
- Patent Title: Magneto-resistive random access memory with laterally-recessed free layer
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Application No.: US17122809Application Date: 2020-12-15
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Publication No.: US11758819B2Publication Date: 2023-09-12
- Inventor: Oscar van der Straten , Koichi Motoyama , Kenneth Chun Kuen Cheng , Joseph F. Maniscalco , Chih-Chao Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Michael A. Petrocelli
- Main IPC: H10N50/10
- IPC: H10N50/10 ; G11C11/16 ; H10B61/00 ; H10N50/01 ; H10N50/80 ; H10N50/85

Abstract:
A memory device, and a method of forming the same, includes a bottom electrode above an electrically conductive structure, the electrically conductive structure is embedded in an interconnect dielectric material. A magnetic tunnel junction stack located above the bottom electrode is formed by a magnetic reference layer above the bottom electrode, a tunnel barrier layer above the magnetic reference layer, and a laterally-recessed magnetic free layer above the tunnel barrier layer. Sidewall spacers surround the laterally-recessed magnetic free layer for confining an active region formed by the laterally-recessed magnetic free and the tunnel barrier layer.
Public/Granted literature
- US20220190235A1 MAGNETO-RESISTIVE RANDOM ACCESS MEMORY WITH LATERALLY-RECESSED FREE LAYER Public/Granted day:2022-06-16
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