- 专利标题: Multipole unit and charged particle beam device
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申请号: US17576156申请日: 2022-01-14
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公开(公告)号: US11769649B2公开(公告)日: 2023-09-26
- 发明人: Masanori Mita , Yoshinobu Ootaka , Hideto Dohi , Zhaohui Cheng
- 申请人: Hitachi High-Tech Corporation
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Tech Corporation
- 当前专利权人: Hitachi High-Tech Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Crowell & Moring LLP
- 优先权: JP 21025344 2021.02.19
- 主分类号: H01J37/153
- IPC分类号: H01J37/153 ; H01J37/141 ; H01J37/147
摘要:
An object is to provide a multipole unit capable of achieving both high positional accuracy and ease of assembling and preventing a decrease in the transmission rate of the magnetic flux. A multipole unit 109a includes a pole 1 that is made of a soft magnetic metal material, a shaft 2 that is made of a soft magnetic metal material and is magnetically connected to the pole, and a coil 3 that is wound around the shaft 2. The pole 1 is provided with a first fitting portion JP1 that forms a first recessed portion or a first protruding portion. The shaft 2 is provided with a second fitting portion JP2 that forms a second protruding portion or a second recessed portion. The first fitting portion JP1 and the second fitting portion JP2 are fitted with each other such that the pole 1 and the shaft 2 are physically separated from each other.
公开/授权文献
- US20220270844A1 Multipole Unit and Charged Particle Beam Device 公开/授权日:2022-08-25
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