公开(公告)号：US11769650B2

公开(公告)日：2023-09-26

申请号：US17297581

申请日：2019-12-23

Applicant: Hitachi High-Tech Corporation

Inventor： Hideto Dohi ,  Yoshinobu Ootaka ,  Masashi Inada ,  Hideyuki Kazumi ,  Hideo Kashima

IPC: H01J37/28 ,  H01J37/141 ,  H01J37/147 ,  H01J37/153

CPC classification number: H01J37/28 ,  H01J37/1413 ,  H01J37/1474 ,  H01J37/153 ,  H01J2237/032 ,  H01J2237/1534

Abstract: Provided are a multistage-connected multipole and a charged particle beam device that can be produced with precision in machining without requiring precision in brazing between a pole and an insulation material. This multi-stage connected multipole 100 comprises: a plurality of poles Q1-Q4 that are arranged along the optical-axis direction of a charged particle beam, and that have cutouts Non surfaces facing each other; and braces P1-P3 that are arranged between the plurality of poles Q1-Q4 and are made of an insulator. The poles Q1-Q4 and the braces P1-P3 are joined by fitting the braces P1-P3 into the cutouts N and applying brazing so as to be interposed by a bonding material.

公开(公告)号：US11769649B2

公开(公告)日：2023-09-26

申请号：US17576156

申请日：2022-01-14

Applicant: Hitachi High-Tech Corporation

Inventor： Masanori Mita ,  Yoshinobu Ootaka ,  Hideto Dohi ,  Zhaohui Cheng

IPC: H01J37/153 ,  H01J37/141 ,  H01J37/147

CPC classification number: H01J37/153 ,  H01J37/1413 ,  H01J37/1474 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/1534

Abstract: An object is to provide a multipole unit capable of achieving both high positional accuracy and ease of assembling and preventing a decrease in the transmission rate of the magnetic flux. A multipole unit 109a includes a pole 1 that is made of a soft magnetic metal material, a shaft 2 that is made of a soft magnetic metal material and is magnetically connected to the pole, and a coil 3 that is wound around the shaft 2. The pole 1 is provided with a first fitting portion JP1 that forms a first recessed portion or a first protruding portion. The shaft 2 is provided with a second fitting portion JP2 that forms a second protruding portion or a second recessed portion. The first fitting portion JP1 and the second fitting portion JP2 are fitted with each other such that the pole 1 and the shaft 2 are physically separated from each other.