公开(公告)号：US11769649B2

公开(公告)日：2023-09-26

申请号：US17576156

申请日：2022-01-14

Applicant: Hitachi High-Tech Corporation

Inventor： Masanori Mita ,  Yoshinobu Ootaka ,  Hideto Dohi ,  Zhaohui Cheng

IPC: H01J37/153 ,  H01J37/141 ,  H01J37/147

CPC classification number: H01J37/153 ,  H01J37/1413 ,  H01J37/1474 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/1534

Abstract: An object is to provide a multipole unit capable of achieving both high positional accuracy and ease of assembling and preventing a decrease in the transmission rate of the magnetic flux. A multipole unit 109a includes a pole 1 that is made of a soft magnetic metal material, a shaft 2 that is made of a soft magnetic metal material and is magnetically connected to the pole, and a coil 3 that is wound around the shaft 2. The pole 1 is provided with a first fitting portion JP1 that forms a first recessed portion or a first protruding portion. The shaft 2 is provided with a second fitting portion JP2 that forms a second protruding portion or a second recessed portion. The first fitting portion JP1 and the second fitting portion JP2 are fitted with each other such that the pole 1 and the shaft 2 are physically separated from each other.