Invention Grant
- Patent Title: Methods for applying a blanket polymer coating to a substrate
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Application No.: US17867530Application Date: 2022-07-18
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Publication No.: US11772127B2Publication Date: 2023-10-03
- Inventor: Yan Liu , Yuxuan Liu , Chandra Venkatraman , Carlo Waldfried
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Main IPC: B05D3/06
- IPC: B05D3/06 ; B05D1/02 ; B05D3/02 ; H01L21/683
Abstract:
Described are techniques for applying a cured polymeric blanket coating onto a surface, specifically for applying a blanket-coated cured polymeric coating onto a surface of a substrate that is useful as an electrostatic chuck for processing semiconductor wafers.
Public/Granted literature
- US20230042148A1 METHODS FOR APPLYING A BLANKET POLYMER COATING TO A SUBSTRATE Public/Granted day:2023-02-09
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