公开(公告)号：US11772127B2

公开(公告)日：2023-10-03

申请号：US17867530

申请日：2022-07-18

Applicant: ENTEGRIS, INC.

Inventor： Yan Liu ,  Yuxuan Liu ,  Chandra Venkatraman ,  Carlo Waldfried

IPC: B05D3/06 ,  B05D1/02 ,  B05D3/02 ,  H01L21/683

CPC classification number: B05D3/06 ,  B05D1/02 ,  B05D3/0254 ,  H01L21/6833

Abstract: Described are techniques for applying a cured polymeric blanket coating onto a surface, specifically for applying a blanket-coated cured polymeric coating onto a surface of a substrate that is useful as an electrostatic chuck for processing semiconductor wafers.

公开(公告)号：US20230042148A1

公开(公告)日：2023-02-09

申请号：US17867530

申请日：2022-07-18

Applicant: ENTEGRIS, INC.

Inventor： Yan Liu ,  Yuxuan Liu ,  Chandra Venkatraman ,  Carlo Waldfried

IPC: B05D3/06 ,  H01L21/683 ,  B05D3/02 ,  B05D1/02

Abstract: Described are techniques for applying a cured polymeric blanket coating onto a surface, specifically for applying a blanket-coated cured polymeric coating onto a surface of a substrate that is useful as an electrostatic chuck for processing semiconductor wafers.

公开(公告)号：US20230337407A1

公开(公告)日：2023-10-19

申请号：US18131208

申请日：2023-04-05

Applicant: ENTEGRIS, INC.

Inventor： Yuxuan Liu ,  Zhifeng Li ,  Carlo Waldfried ,  Yan Liu ,  Chandra Venkatraman ,  Pushkara Rao Varanasi

IPC: H05K9/00 ,  H01L21/683

CPC classification number: H05K9/0079 ,  H01L21/6833

Abstract: A conductive polymeric layer on an electrostatic chuck. The conductive polymeric layer comprises a conductive polymer and a photosensitive polymer. The conductivity of the conductive polymer promotes charge dissipation by the conductive polymeric layer, while the photosensitivity of the photosensitive polymer allows the surface of the conductive polymeric layer to be photopatterned. The extent to which the conductive polymeric layer is conductive and photosensitive may be modulated by varying the relative amounts of the conductive polymer and the photosensitive polymer.

公开(公告)号：US12101920B2

公开(公告)日：2024-09-24

申请号：US18131208

申请日：2023-04-05

Applicant: ENTEGRIS, INC.

Inventor： Yuxuan Liu ,  Zhifeng Li ,  Carlo Waldfried ,  Yan Liu ,  Chandra Venkatraman ,  Pushkara Rao Varanasi

IPC: H05K9/00 ,  H01B1/00 ,  H01B1/12 ,  H01L21/683

CPC classification number: H05K9/0079 ,  H01B1/124 ,  H01L21/6833

Abstract: A conductive polymeric layer on an electrostatic chuck. The conductive polymeric layer comprises a conductive polymer and a photosensitive polymer. The conductivity of the conductive polymer promotes charge dissipation by the conductive polymeric layer, while the photosensitivity of the photosensitive polymer allows the surface of the conductive polymeric layer to be photopatterned. The extent to which the conductive polymeric layer is conductive and photosensitive may be modulated by varying the relative amounts of the conductive polymer and the photosensitive polymer.