- 专利标题: Ring resonator with integrated photodetector for power monitoring
-
申请号: US17582900申请日: 2022-01-24
-
公开(公告)号: US11774679B2公开(公告)日: 2023-10-03
- 发明人: Pavan Bhargava , John Fini , Derek Van Orden , Chen Sun , Mark Wade
- 申请人: Ayar Labs, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Ayar Labs, Inc.
- 当前专利权人: Ayar Labs, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Penilla IP, APC
- 主分类号: G02B6/293
- IPC分类号: G02B6/293 ; G02F1/225 ; G01J1/04 ; G01J1/44 ; G02B6/12 ; H01L31/0232 ; H01L31/105
摘要:
A ring resonator device includes a passive optical cavity having a circuitous configuration into which is built a photodetector device. The photodetector device includes a first implant region formed within the passive optical cavity that includes a first type of implanted doping material. The photodetector device includes a second implant region formed within the passive optical cavity that includes a second type of implanted doping material, where the second type of implanted doping material is different than the first type of implanted doping material. The photodetector device includes an intrinsic absorption region present within the passive optical cavity between the first implant region and the second implant region. A first electrical contact is electrically connected to the first implant region and to a detecting circuit. A second electrical contact is electrically connected to the second implant region and to the detecting circuit.
公开/授权文献
信息查询