- Patent Title: Surface treatment method and apparatus for semiconductor packaging
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Application No.: US17073937Application Date: 2020-10-19
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Publication No.: US11776880B2Publication Date: 2023-10-03
- Inventor: Chih-Horng Chang , Jie-Cheng Deng , Tin-Hao Kuo , Ying-Yu Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L21/56 ; H01L23/00 ; H01L23/31

Abstract:
A surface treatment and an apparatus for semiconductor packaging are provided. A surface of a conductive layer is treated to create a roughened surface. In one example, nanowires are formed on a surface of the conductive layer. In the case of a copper conductive layer, the nanowires may include a CuO layer. In another example, a complex compound is formed on a surface of the conductive layer. The complex compound may be formed using, for example, thiol and trimethyl phosphite.
Public/Granted literature
- US20210050281A1 Surface Treatment Method and Apparatus for Semiconductor Packaging Public/Granted day:2021-02-18
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