- Patent Title: Vertical transistors for ultra-dense logic and memory applications
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Application No.: US16455567Application Date: 2019-06-27
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Publication No.: US11777029B2Publication Date: 2023-10-03
- Inventor: Nazila Haratipour , I-Cheng Tung , Abhishek A. Sharma , Arnab Sen Gupta , Van Le , Matthew V. Metz , Jack Kavalieros , Tahir Ghani
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Essential Patents Group, LLP
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/423 ; H01L29/66

Abstract:
A vertical transistor structure includes a material stack having a source material, a drain material, and a channel material therebetween. The vertical transistor structure further includes a gate electrode adjacent to a sidewall of the stack, where the sidewall includes the channel material, and at least a partial thickness of both the source material and the drain material. A gate dielectric is present between the sidewall of the stack and the gate electrode. The vertical transistor structure further includes a first metallization over a first area of the stack above the gate dielectric layer, and in contact with the gate electrode on sidewall of the stack. A second metallization is adjacent to the first metallization, where the second metallization is over a second area of the stack, and in contact with the source material or the drain material.
Information query
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