Invention Grant
- Patent Title: Overlap susceptor and preheat ring
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Application No.: US17224537Application Date: 2021-04-07
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Publication No.: US11781212B2Publication Date: 2023-10-10
- Inventor: Zhepeng Cong , Schubert Chu , Nyi Oo Myo , Kartik Bhupendra Shah , Zhiyuan Ye , Richard O. Collins
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Material, Inc.
- Current Assignee: Applied Material, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: PATTERSON & SHERIDAN, LLP
- Main IPC: C23C14/24
- IPC: C23C14/24 ; H01L21/67 ; C23C14/50

Abstract:
Embodiments disclosed herein generally provide improved control of gas flow in processing chambers. In at least one embodiment, a liner for a processing chamber includes an annular body having a sidewall and a vent formed in the annular body for exhausting gas from inside to outside the annular body. The vent comprises one or more vent holes disposed through the sidewall. The liner further includes an opening in the annular body for substrate loading and unloading.
Public/Granted literature
- US20220325400A1 OVERLAP SUSCEPTOR AND PREHEAT RING Public/Granted day:2022-10-13
Information query
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