Invention Grant
- Patent Title: Localized heating/cooling using thermocouple between probe pins
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Application No.: US17536211Application Date: 2021-11-29
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Publication No.: US11796590B2Publication Date: 2023-10-24
- Inventor: Pablo Nieves , Kushagra Sinha , Reinaldo Vega
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Samuel Waldbaum
- Main IPC: G01R31/28
- IPC: G01R31/28 ; H01L21/66 ; G01R31/319

Abstract:
A system includes probe pins each including a probe tip and a plurality of thermocouples arranged such that at least one thermocouple is positioned between a pair of the probe pins. The plurality of thermocouples can be placed adjacent or above a device under test (DUT). The probe tips of the probe pins are placed over a plurality of pads. The plurality of thermocouples are placed adjacent or between the plurality of pads. The at least one thermocouple positioned between the pair of the probe pins can be either a single thermocouple or a thermocouple array.
Public/Granted literature
- US20230168297A1 LOCALIZED HEATING/COOLING USING THERMOCOUPLE BETWEEN PROBE PINS Public/Granted day:2023-06-01
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