- 专利标题： Method and apparatus for solvent recycling
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申请号： US17359038申请日： 2021-06-25
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公开(公告)号： US11798800B2公开(公告)日： 2023-10-24
- 发明人: Chun-Wei Liao , Tung-Hung Feng , Hui-Chun Lee , Shih-Che Wang
- 申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 申请人地址： TW Hsinchu
- 专利权人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址： TW Hsinchu
- 代理机构： McDermott Will & Emery LLP
- 主分类号： B08B9/00
- IPC分类号： B08B9/00 ; B08B3/04 ; H01L21/02 ; H01L21/67 ; H01L21/311 ; G03F1/80
摘要：
A solvent recycle system minimizes chemical consumption used in various semiconductor processes. The solvent is recycled from a nozzle bath via the addition of buffer tank to connect the bath and circulation pumps. Improvements to the bath design further maintain solvent cleanness by preventing intrusion of particles and overflow conditions in the bath.
公开/授权文献
- US20220415646A1 METHOD AND APPARATUS FOR SOLVENT RECYCLING 公开/授权日：2022-12-29
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