Invention Grant
- Patent Title: Hybrid bond pad structure
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Application No.: US17333120Application Date: 2021-05-28
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Publication No.: US11804473B2Publication Date: 2023-10-31
- Inventor: Sin-Yao Huang , Chun-Chieh Chuang , Ching-Chun Wang , Sheng-Chau Chen , Dun-Nian Yaung , Feng-Chi Hung , Yung-Lung Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- The original application number of the division: US15626834 2017.06.19
- Main IPC: H01L25/00
- IPC: H01L25/00 ; H01L25/065 ; H01L23/498 ; H01L27/146 ; H01L23/00 ; H01L23/52

Abstract:
In some embodiments, the present disclosure relates to an integrated chip structure. The integrated chip structure includes a first plurality of interconnects arranged within a first inter-level dielectric (ILD) structure on a first substrate, and a second plurality of interconnects arranged within a second ILD structure between the first ILD structure and a second substrate. A bonding structure is disposed within a recess extending through the second substrate. A connector structure is vertically between the first plurality of interconnects and the second plurality of interconnects. The second plurality of interconnects include a first interconnect directly contacting the bonding structure. The second plurality of interconnects also include one or more extensions extending from directly below the first interconnect to laterally outside of the first interconnect and directly above the connector structure, as viewed along a cross-sectional view.
Public/Granted literature
- US20210288029A1 HYBRID BOND PAD STRUCTURE Public/Granted day:2021-09-16
Information query
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