- 专利标题: Multi-gate nor flash thin-film transistor strings arranged in stacked horizontal active strips with vertical control gates
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申请号: US17579364申请日: 2022-01-19
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公开(公告)号: US11817156B2公开(公告)日: 2023-11-14
- 发明人: Eli Harari
- 申请人: SUNRISE MEMORY CORPORATION
- 申请人地址: US CA San Jose
- 专利权人: SUNRISE MEMORY CORPORATION
- 当前专利权人: SUNRISE MEMORY CORPORATION
- 当前专利权人地址: US CA San Jose
- 代理机构: VLP Law Group LLP
- 代理商 Edward C. Kwok
- 分案原申请号: US16901758 2020.06.15
- 主分类号: G11C16/34
- IPC分类号: G11C16/34 ; H01L21/28 ; G11C16/04 ; G11C16/10 ; G11C16/26 ; G11C16/28 ; H01L29/66 ; H01L27/06 ; H01L29/792 ; H10B43/27 ; H10B43/40 ; G11C11/56 ; H10B43/10
摘要:
Multi-gate NOR flash thin-film transistor (TFT) string arrays (“multi-gate NOR string arrays”) are organized as stacks of horizontal active strips running parallel to the surface of a silicon substrate, with the TFTs in each stack being controlled by vertical local word-lines provided along one or both sidewalls of the stack of active strips. Each active strip includes at least a channel layer formed between two shared source or drain layers. Data storage in the TFTs of an active strip is provided by charge-storage elements provided between the active strip and the control gates provided by the adjacent local word-lines. Each active strip may provide TFTs that belong to one or two NOR strings, depending on whether one or both sides of the active strip are used.
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