- 专利标题: Three-dimensional semiconductor memory device
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申请号: US17011156申请日: 2020-09-03
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公开(公告)号: US11839091B2公开(公告)日: 2023-12-05
- 发明人: Junhyoung Kim , Kwang-Soo Kim , Bonghyun Choi , Siwan Kim
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Lee IP Law, P.C.
- 优先权: KR 20180101549 2018.08.28
- 分案原申请号: US16403795 2019.05.06
- 主分类号: H10B43/20
- IPC分类号: H10B43/20 ; H10B69/00
摘要:
A three-dimensional semiconductor memory device including a substrate including a cell array region and a first connection region arranged in a first direction; and a first block structure on the substrate, the first block structure including a lower stack including a plurality of lower electrodes vertically stacked on the substrate; and intermediate stacks exposing the lower stack, the intermediate stacks including a plurality of intermediate electrodes vertically stacked on the lower stack, wherein, on the cell array region, the first block structure has a first width in a second direction crossing the first direction, and wherein, on the first connection region, the first block structure has a second width, which is larger than the first width, in the second direction.
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