- 专利标题: Method of producing a two-dimensional material
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申请号: US17893802申请日: 2022-08-23
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公开(公告)号: US11848206B2公开(公告)日: 2023-12-19
- 发明人: Simon Charles Stewart Thomas
- 申请人: Paragraf Ltd.
- 申请人地址: GB Somersham
- 专利权人: Paragraf Ltd.
- 当前专利权人: Paragraf Ltd.
- 当前专利权人地址: GB Somersham
- 代理机构: Stinson LLP
- 优先权: GB 14542 2015.08.14 GB 19182 2015.10.30 GB 23083 2015.12.30 GB 10467 2016.06.15
- 主分类号: C30B25/16
- IPC分类号: C30B25/16 ; H01L21/02 ; C30B25/10 ; C30B29/02 ; C30B29/06 ; C30B29/60 ; C23C16/26 ; C23C16/24 ; C01B32/186 ; C23C16/455 ; C30B25/14 ; C30B29/40
摘要:
A method of producing graphene or other two-dimensional material such as graphene including heating the substrate held within a reaction chamber to a temperature that is within a decomposition range of a precursor, and that allows two-dimensional crystalline material formation from a species released from the decomposed precursor; establishing a steep temperature gradient (preferably >1000° C. per meter) that extends away from the substrate surface towards an inlet for the precursor; and introducing precursor through the relatively cool inlet and across the temperature gradient towards the substrate surface. The steep temperature gradient ensures that the precursor remains substantially cool until it is proximate the substrate surface thus minimizing decomposition or other reaction of the precursor before it is proximate the substrate surface. The separation between the precursor inlet and the substrate is less than 100 mm.
公开/授权文献
- US20220399201A1 A METHOD OF PRODUCING A TWO-DIMENSIONAL MATERIAL 公开/授权日:2022-12-15
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