Invention Grant
- Patent Title: Semiconductor chamber component cleaning systems
-
Application No.: US17077711Application Date: 2020-10-22
-
Publication No.: US11848218B2Publication Date: 2023-12-19
- Inventor: Katty Guyomard , Chidambara A. Ramalingam , Shawyon Jafari , Palash Joshi , Moin Ahmed Khan , Kirubanandan Naina Shanmugam , Subhaschandra Shreepad Salkod , Avishek Ghosh , David W. Groechel , Li Wu , Dorothea Buechel-Rimmel
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B08B3/04

Abstract:
Exemplary semiconductor chamber component cleaning systems may include a receptacle. The receptacle may include a bottom lid that may be an annulus. The annulus may be characterized by an inner annular wall and an outer annular wall. A plurality of recessed annular ledges may be defined between the inner annular wall and the outer annular wall. Each recessed annular ledge of the plurality of recessed annular ledges may be formed at a different radial position along the bottom lid. The cleaning systems may include a top lid removably coupled with the bottom lid about an exterior region of the top lid. The cleaning systems may include a tank defining a volume to receive the receptacle.
Public/Granted literature
- US20220130692A1 SEMICONDUCTOR CHAMBER COMPONENT CLEANING SYSTEMS Public/Granted day:2022-04-28
Information query
IPC分类: