Invention Grant
- Patent Title: Ultrasonic MEMS acoustic transducer with reduced stress sensitivity and manufacturing process thereof
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Application No.: US16684289Application Date: 2019-11-14
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Publication No.: US11865581B2Publication Date: 2024-01-09
- Inventor: Gabriele Gattere , Carlo Valzasina , Federico Vercesi , Giorgio Allegato
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT 2018000010485 2018.11.21
- Main IPC: B06B1/06
- IPC: B06B1/06 ; B81B7/00 ; B81C1/00

Abstract:
An ultrasonic MEMS acoustic transducer formed in a body of semiconductor material having first and second surfaces opposite to one another. A first cavity extends in the body and delimits at the bottom a sensitive portion, which extends between the first cavity and the first surface of the body. The sensitive portion houses a second cavity and forms a membrane that extends between the second cavity and the first surface of the body. An elastic supporting structure extends between the sensitive portion and the body and is suspended over the first cavity.
Public/Granted literature
- US20200156114A1 ULTRASONIC MEMS ACOUSTIC TRANSDUCER WITH REDUCED STRESS SENSITIVITY AND MANUFACTURING PROCESS THEREOF Public/Granted day:2020-05-21
Information query
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