Invention Grant
- Patent Title: Nonvolatile memory device and method for fabricating the same
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Application No.: US17517137Application Date: 2021-11-02
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Publication No.: US11871571B2Publication Date: 2024-01-09
- Inventor: Soodoo Chae , Myoungbum Lee , HuiChang Moon , Hansoo Kim , JinGyun Kim , Kihyun Kim , Siyoung Choi , Hoosung Cho
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR 20080121886 2008.12.03 KR 20090016406 2009.02.26
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H10B43/10 ; H10B43/20 ; H10B43/50 ; H01L23/498 ; H01L23/535 ; H01L29/40 ; H01L29/423 ; H01L23/522

Abstract:
A three-dimensional nonvolatile memory device and a method for fabricating the same include a semiconductor substrate, a plurality of active pillars, a plurality of gate electrodes, and a plurality of supporters. The semiconductor substrate includes a memory cell region and a contact region. The active pillars extend in the memory cell region perpendicularly to the semiconductor substrate. The gate electrodes intersect the active pillars, extend from the memory cell region to the contact region and are stacked on the semiconductor substrate. The supporters extend in the contact region perpendicularly to the semiconductor substrate to penetrate at least one or more of the gate electrodes.
Public/Granted literature
- US20220059567A1 NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2022-02-24
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