Invention Grant
- Patent Title: Integrated assemblies having vertically-spaced channel material segments, and methods of forming integrated assemblies
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Application No.: US17561564Application Date: 2021-12-23
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Publication No.: US11871572B2Publication Date: 2024-01-09
- Inventor: Shyam Surthi , Davide Resnati , Paolo Tessariol , Richard J. Hill , John D. Hopkins
- Applicant: Lodestar Licensing Group LLC
- Applicant Address: US IL Evanston
- Assignee: Lodestar Licensing Group LLC
- Current Assignee: Lodestar Licensing Group LLC
- Current Assignee Address: US IL Evanston
- Agency: Brooks, Cameron & Huebsch, PLLC
- The original application number of the division: US16548320 2019.08.22
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11556 ; H01L29/51 ; H01L21/28 ; H01L21/02 ; H01L29/788 ; H01L29/792 ; H10B43/27 ; H01L29/49 ; H10B41/27

Abstract:
Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include control gate regions. High-k dielectric material is adjacent to the control gate regions and is configured as an arrangement of first vertically-extending linear segments which are vertically spaced from one another. Charge-blocking material is adjacent to the high-k dielectric material and is configured as an arrangement of second vertically-extending linear segments which are vertically spaced from one another. Charge-storage material is adjacent to the charge-blocking material and is configured as an arrangement of third vertically-extending linear segments which are vertically spaced from one another. Gate-dielectric material is adjacent to the charge-storage material. Channel material extends vertically along the stack and is adjacent to the gate-dielectric material. Some embodiments include integrated assemblies and methods of forming integrated assemblies.
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