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公开(公告)号:US11871572B2
公开(公告)日:2024-01-09
申请号:US17561564
申请日:2021-12-23
Applicant: Lodestar Licensing Group LLC
Inventor: Shyam Surthi , Davide Resnati , Paolo Tessariol , Richard J. Hill , John D. Hopkins
IPC: H01L27/11582 , H01L27/11556 , H01L29/51 , H01L21/28 , H01L21/02 , H01L29/788 , H01L29/792 , H10B43/27 , H01L29/49 , H10B41/27
CPC classification number: H10B43/27 , H01L21/0214 , H01L21/0217 , H01L21/02164 , H01L21/02236 , H01L29/40114 , H01L29/40117 , H01L29/4991 , H01L29/513 , H01L29/517 , H01L29/7883 , H01L29/792 , H10B41/27
Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include control gate regions. High-k dielectric material is adjacent to the control gate regions and is configured as an arrangement of first vertically-extending linear segments which are vertically spaced from one another. Charge-blocking material is adjacent to the high-k dielectric material and is configured as an arrangement of second vertically-extending linear segments which are vertically spaced from one another. Charge-storage material is adjacent to the charge-blocking material and is configured as an arrangement of third vertically-extending linear segments which are vertically spaced from one another. Gate-dielectric material is adjacent to the charge-storage material. Channel material extends vertically along the stack and is adjacent to the gate-dielectric material. Some embodiments include integrated assemblies and methods of forming integrated assemblies.