发明授权
- 专利标题: Semiconductor storage device and method for manufacturing semiconductor storage device
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申请号: US17190348申请日: 2021-03-02
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公开(公告)号: US11889698B2公开(公告)日: 2024-01-30
- 发明人: Yasuhito Yoshimizu , Hiroshi Nakaki , Kazuaki Nakajima
- 申请人: KIOXIA CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: Kioxia Corporation
- 当前专利权人: Kioxia Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Kim & Stewart LLP
- 优先权: JP 20153733 2020.09.14
- 主分类号: H10B43/35
- IPC分类号: H10B43/35 ; H01L23/00 ; H10B41/10 ; H10B41/20 ; H10B41/35 ; H10B43/10 ; H10B43/20
摘要:
A semiconductor storage device includes first wiring layers stacked along a first direction, a first pillar including a first semiconductor layer and extending along the first direction through the first wiring layers, a second wiring layer disposed above the first pillar in the first direction and extending along a second direction perpendicular to the first direction, a semiconductor-containing layer including a first portion disposed on an upper end of the first pillar in the first direction, a second portion contacting the first portion and formed along the second wiring layer, and a third portion contacting an upper end of the second portion and extending along a third direction perpendicular to the first direction and crossing the second direction, and a first insulating layer between each of the first and second portions of the semiconductor-containing layer and the second wiring layer. An upper surface of the third portion contains a metal.
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