Invention Grant
- Patent Title: Micromechanical component and method for manufacturing a micromechanical component
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Application No.: US17287389Application Date: 2019-12-13
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Publication No.: US11912563B2Publication Date: 2024-02-27
- Inventor: Hans Artmann , Christoph Hermes , Heribert Weber , Jochen Reinmuth , Peter Schmollngruber , Thomas Friedrich
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: NORTON ROSE FULBRIGHT US LLP
- Agent Gerard A. Messina
- Priority: DE 2018222730.6 2018.12.21
- International Application: PCT/EP2019/085101 2019.12.13
- International Announcement: WO2020/126911A 2020.06.25
- Date entered country: 2021-04-21
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00 ; G01L7/08 ; G01L9/00

Abstract:
A micromechanical component, whose diaphragm is supported and has support structures on its inner diaphragm side. Each of the support structures includes a first and second edge element structure, and at least one intermediate element structure positioned between the first and second edge element structures. For each of the support structures, a plane of symmetry is definable, with respect to which at least the first edge element structure of the respective support structure and the second edge element structure of the respective support structure are specularly symmetric. In each of support structures, a first maximum dimension of its first edge element structure perpendicular to its plane of symmetry and a second maximum dimension of its second edge element structure perpendicular to its plane of symmetry are greater than the maximum dimension of its intermediate element structure perpendicular to its plane of symmetry.
Public/Granted literature
- US20210395074A1 MICROMECHANICAL COMPONENT AND METHOD FOR MANUFACTURING A MICROMECHANICAL COMPONENT Public/Granted day:2021-12-23
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