发明授权
- 专利标题: Micromechanical component and method for manufacturing a micromechanical component
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申请号: US17287389申请日: 2019-12-13
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公开(公告)号: US11912563B2公开(公告)日: 2024-02-27
- 发明人: Hans Artmann , Christoph Hermes , Heribert Weber , Jochen Reinmuth , Peter Schmollngruber , Thomas Friedrich
- 申请人: Robert Bosch GmbH
- 申请人地址: DE Stuttgart
- 专利权人: ROBERT BOSCH GMBH
- 当前专利权人: ROBERT BOSCH GMBH
- 当前专利权人地址: DE Stuttgart
- 代理机构: NORTON ROSE FULBRIGHT US LLP
- 代理商 Gerard A. Messina
- 优先权: DE 2018222730.6 2018.12.21
- 国际申请: PCT/EP2019/085101 2019.12.13
- 国际公布: WO2020/126911A 2020.06.25
- 进入国家日期: 2021-04-21
- 主分类号: B81B3/00
- IPC分类号: B81B3/00 ; B81C1/00 ; G01L7/08 ; G01L9/00
摘要:
A micromechanical component, whose diaphragm is supported and has support structures on its inner diaphragm side. Each of the support structures includes a first and second edge element structure, and at least one intermediate element structure positioned between the first and second edge element structures. For each of the support structures, a plane of symmetry is definable, with respect to which at least the first edge element structure of the respective support structure and the second edge element structure of the respective support structure are specularly symmetric. In each of support structures, a first maximum dimension of its first edge element structure perpendicular to its plane of symmetry and a second maximum dimension of its second edge element structure perpendicular to its plane of symmetry are greater than the maximum dimension of its intermediate element structure perpendicular to its plane of symmetry.
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